发明名称 PROTECTION DEVICE FOR SOLID STATE LASER
摘要 Embodiments of the invention provide systems, devices, and methods for controlling a laser. The system includes a controller to control a laser a ramp generator to ramp down power to the laser, the ramp generator electrically coupled with the controller and coupleable with the laser, and a hardware protection system electrically coupled with the ramp generator, wherein the ramp generator monitors signals sent from the controller and the hardware protection system to the ramp generator to detect signal failure and ramps down the power to the laser upon signal failure detection. The method includes sending a control status signal from a controller for a laser to a ramp generator, monitoring the control status signal for missing pulses, sending a hardware interlock status signal from a hardware protection system to the ramp generator, monitoring the hardware interlock status signal for signal failure, and ramping down power to the laser upon detection of missing pulses or signal failure.
申请公布号 WO2012091910(A2) 申请公布日期 2012.07.05
申请号 WO2011US64462 申请日期 2011.12.12
申请人 APPLIED MATERIALS, INC.;SEREBRYANOV, OLEG V.;GOLDIN, ALEXANDER;MAYUR, ABHILASH J.;TERTITSKI, LEONID M. 发明人 SEREBRYANOV, OLEG V.;GOLDIN, ALEXANDER;MAYUR, ABHILASH J.;TERTITSKI, LEONID M.
分类号 H01S3/10;H01S3/13;H01S5/06 主分类号 H01S3/10
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