发明名称 VACUUM VALVE WITH PROTECTED SEALING SURFACE
摘要 A valve assembly disposed within a vacuum environment which is configured to protect the sealing surfaces thereof to prolong life of the valve assembly. The valve assembly includes a sealing piston and a flange portion that define a passage therethrough. The sealing piston is movable toward and away from the flange portion to define a chamber. When the valve assembly is in an open position, a valve seal attached to the sealing piston engages a surface of the flange portion. When the valve assembly is to be closed, the sealing piston is displaced away from the flange portion which disengages the valve seal from the surface of the flange and a gate is disposed within the space defined between the sealing piston and the flange portion. The gate includes a gate seal which engages the surface of the flange portion when the gate is disposed within the chamber.
申请公布号 US2012168662(A1) 申请公布日期 2012.07.05
申请号 US20100982754 申请日期 2010.12.30
申请人 BORICHEVSKY STEVEN C.;VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 BORICHEVSKY STEVEN C.
分类号 F16K1/36;B23P19/00;F16K3/00 主分类号 F16K1/36
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