| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical unit in which heat exchange can be carried out quickly between an optical member and a temperature adjustment mechanism, and to provide an exposure device and a method of manufacturing a device. <P>SOLUTION: The optical unit comprises: a support member 50 having a supporting surface 50a for supporting a second surface 49 of an incident side fly-eye mirror 48, and a rear surface 50b different from the supporting surface 50a and a first through hole 63a formed to penetrate from the supporting surface 50a to the rear surface 50b; a bolt 64 with a shaft 65 having a distal end side part 65b engaging with the incident side fly-eye mirror 48, a proximal end side part 65a arranged in the first through hole 63a, and a second through hole 67 penetrating from one end to the other end of the shaft 65, and engaging the incident side fly-eye mirror 48 and the support member 50; a projection member 69 inserted into the second through hole 67 of the bolt 64 and performing heat exchange between the incident side fly-eye mirror 48; and a temperature adjustment device 44 which adjusts the temperature of the incident side fly-eye mirror 48 via the projection member 69. <P>COPYRIGHT: (C)2012,JPO&INPIT |
