| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately evaluate a front-surface shape of an object to be evaluated by eliminating influences of a reflection image made by being reflected by a second front surface opposed to a first front surface. <P>SOLUTION: An apparatus for evaluation is configured to capture a stripe pattern 1 projected on a front surface 3a of an object to be evaluated 3 such as a plate glass by a CCD camera 2. The stripe pattern 1 is provided on a light-emitting surface of a light source. The wavelength of light emitted from the light source is 200 to 380 nm. The image captured by the CCD camera 2 is taken into a computer 4 that functions as an arithmetic unit, and the computer 4 analyzes the image. <P>COPYRIGHT: (C)2012,JPO&INPIT |
