| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for evaluating a particle number concentration of standard particle suspension of which the particle size is 250 nm or less. <P>SOLUTION: A planar substrate is moved relatively to an ink jet nozzle, a droplet of particle suspension diluted at a dilution rate γ is discharged to a previously programmed position on the planar substrate by the ink jet nozzle, the droplet is attached and evaporated, images of all particles included in a trace of one evaporated droplet are acquired by an electron microscope, the image group of these particles is combined to one image, and a particle number N is found out by counting the total number of particles by the image. The droplets are previously continuously discharged and collected in a container set on an electron mass balance by the ink jet nozzle, a mass change speed at the discharge and collection of droplets and droplet generation frequency by the nozzle are measured, a value calculated by dividing the mass change speed by the droplet generation frequency is found out as average mass per droplet, volume V per droplet is found out by dividing the average mass by separately measured mass density of the particle suspension, and the particle number concentration C of the suspension is calculated by the equation C=(N/V) γ. <P>COPYRIGHT: (C)2012,JPO&INPIT |
