Methods and Structures Involving Terminal Connections

摘要

A method for forming a conductive contact includes forming a copper contact region in an intermediary layer, depositing an insulator layer over the copper contact region and the intermediary layer, patterning a photoresist layer on the insulator layer, etching to remove a portion of the insulator layer and expose a portion of the copper contact region, depositing a conductive material layer over the exposed portion of the copper contact region and the photoresist layer, and removing the photoresist layer and the conductive material layer disposed on the photoresist layer.