发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
PURPOSE: A semiconductor device and a manufacturing method thereof are provided to improve productivity of the semiconductor device by preventing a GOIF(Gate Oxide Integrity Fail) and an USIF(Unlimited Sensing Delay Fail) due to an oxidation of a buried gate. CONSTITUTION: A semiconductor device includes a cell area(I) and a peripheral circuit(II). An element isolation film determining an active area(105) is formed on the cell area. A buried gate(125a) is formed on the cell area. A bit-line contact plug(130) is formed on the active area between the buried gates. A guard ring active area is included at boundary of the cell area and the peripheral area.
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申请公布号 |
KR20120074270(A) |
申请公布日期 |
2012.07.05 |
申请号 |
KR20120065068 |
申请日期 |
2012.06.18 |
申请人 |
SK HYNIX INC. |
发明人 |
LEE, DONG GEUN;KIM, SUNG HYUN |
分类号 |
H01L27/108;H01L21/8242 |
主分类号 |
H01L27/108 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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