发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A semiconductor device and a manufacturing method thereof are provided to improve productivity of the semiconductor device by preventing a GOIF(Gate Oxide Integrity Fail) and an USIF(Unlimited Sensing Delay Fail) due to an oxidation of a buried gate. CONSTITUTION: A semiconductor device includes a cell area(I) and a peripheral circuit(II). An element isolation film determining an active area(105) is formed on the cell area. A buried gate(125a) is formed on the cell area. A bit-line contact plug(130) is formed on the active area between the buried gates. A guard ring active area is included at boundary of the cell area and the peripheral area.
申请公布号 KR20120074270(A) 申请公布日期 2012.07.05
申请号 KR20120065068 申请日期 2012.06.18
申请人 SK HYNIX INC. 发明人 LEE, DONG GEUN;KIM, SUNG HYUN
分类号 H01L27/108;H01L21/8242 主分类号 H01L27/108
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