| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a zinc oxide-based sintered compact which is so dense that a transparent electrode having reduced specific resistance can be obtained without abnormal discharge being generated when it is used for a sputtering target. <P>SOLUTION: The zinc oxide sintered compact contains low-valence titanium of >2 to 10 mol, its relative density is ≥95%, and also, the content ratio of composite oxide is ≤10%. The zinc oxide sintered compact can be obtained by mixing zinc oxide powder and composite oxide powder of zinc and low-valence titanium in such a manner that the low-valence titanium is contained by >2 to 10 mol%, thereafter molding the mixture and then performing sintering at 800 to 1,500°C. <P>COPYRIGHT: (C)2012,JPO&INPIT |
