| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently form a modified layer by laser beam machining in regions to be machined of a workpiece in which the regions are not formed on a straight line. <P>SOLUTION: When the workpiece W having streets S1-S3 where a plurality of regions 7a-7n to be machined which have dividing direction positions extended in parallel in a dispersion machining direction are intermittently formed is divided and machined along each of the streets, coordinates of the dividing direction and the machining direction of each of the regions are stored in a storage means of the device, the region is irradiated with a laser beam based on the coordinate of the region stored in the storage means, and irradiation of the laser beam is stopped until the irradiation position is moved to the coordinate in the position of the machining direction in which the next region exists, and correction is made so that the irradiation position of the laser beam is coincident with the coordinate in the position of the dividing direction in which the region to be machined next exists during stopping, and the laser beam is intermittently emitted to the plurality of the regions by one machining feed while repeating irradiation, stop, and correction of the laser beam, and thus, productivity is improved. <P>COPYRIGHT: (C)2012,JPO&INPIT |
