| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum pump capable of reducing misalignment in a radial direction of a rotor, caused by deformation of the rotor. <P>SOLUTION: The vacuum pump includes: a shaft 33 having a fastening surface 335 perpendicular to the axial center; positioning pins 40a, 40b vertically disposed on the fastening surface 335; a rotor 30 bolted to the fastening surface 335 and having respective through holes 301 through which the positioning pins 40a, 40b are inserted; and a motor rotating and driving the shaft 33. The positioning pin 40a is vertically disposed in a position on a line L1 which is perpendicular to the axial center, on the fastening surface 335. The positioning pin 40b is vertically disposed in a position on a line L2 which is perpendicular to the axial center and forms a prescribed angle θ with the line L1, on the fastening surface 335. <P>COPYRIGHT: (C)2012,JPO&INPIT |
