ANGULAR VELOCITY SENSOR

摘要

Provided is an angular velocity sensor comprising a detection element which has a shape defined in XYZ space and is capable of detecting angular velocity about the Z axis. The detection element has a support extending in the direction of the X axis, an arm connected to the support, and a plumb connected to the arm. The arm has a first end connected to the support and a second end connected to the arm. The arm substantially has a J shape comprising a first arm section extending from the first end to a first corner in the direction of the Y axis, a second arm section extending from the first corner to a second corner in the direction of the X axis, and a third arm section extending from the second corner to the second end in the direction of the Y axis. The length of the arm in the direction of the X axis is greater than the length of the plumb in the direction of the X axis. The sensitivity of the angular velocity sensor with respect to angular velocity about the Z axis can be improved.