MEMS SWITCH AND MANUFACTURING METHOD THEREOF

摘要

A micro-electro-mechanical system (MEMS) switch and a manufacturing method thereof are provided. The MEMS switch includes a semiconductor substrate (10); a switch chamber (100) which is formed on the semiconductor substrate (10) and includes a bottom dielectric layer (100a) and a top dielectric layer (100b); a first group switch contacts (101) which are formed on the bottom dielectric layer (100a); a second group switch contacts (102) which are formed on the top dielectric layer (100b); a mechanical arm (400) which includes an attaching end (400a) attached to the bottom dielectric layer (100a) and a cantilevered end (400b) on which a throwing knife (401) is formed. The throwing knife (401) is corresponded with the position of the first group switch contacts (101) and the second group switch contacts (102); when an electric field is applied in the switch chamber (100), the mechanical arm (400) is subjected to the driving electric field and then bended, such that the throwing knife (401) is connected to the first group switch contacts (101) or the second group switch contacts (102).