发明名称 METHOD OF FABRICATING THIN FILM TRANSISTOR SUBSTRATE AND PHOTORESIST COMPOSITION USED THEREIN
摘要 <p>PURPOSE: A positive type photoresist composition and a method for manufacturing a thin film transistor display panel using the same are provided to improve film speed, residual film rate, development contrast, and resolution. CONSTITUTION: A positive type photoresist composition includes an alkali soluble novolak resin, a diazonaphthoquinone compound, an adhesion increasing agent, and an organic solvent. The adhesion increasing agent is bis(1,2,2,6,6-pentamethyl-4-piperidinyl)-((3,5-bis(1,1-dimethylethyl)-4-hydroxyphenyl)methyl)butylmalonate which is represented by chemical formula 1. The content of the adhesion increasing agent is in a range between 0.01 and 10 weight%.</p>
申请公布号 KR20120073988(A) 申请公布日期 2012.07.05
申请号 KR20100135927 申请日期 2010.12.27
申请人 SAMSUNG ELECTRONICS CO., LTD.;AZ ELECTRONIC MATERIALS (JAPAN) K.K. 发明人 JEON, WOO SEOK;KANG, HOON;KIM, JAE SUNG;KANG, DOEK MAN;KWON, KYONG AH
分类号 G03F7/039;G03F7/016;H01L21/027 主分类号 G03F7/039
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