| 摘要 |
A mixed sterilization apparatus using hydrogen peroxide and ozone, comprising:
a sterilization chamber (2) which holds a sterilization subject and is sealed from outside;
an ozone provider (3) which converts an oxygen-containing substance outside the sterilization chamber (2) or oxygen contained inside the sterilization chamber (2) and provides the converted ozone into the sterilization chamber (2);
a vacuumization accelerator (4) which vacuumizes the inside of the sterilization chamber (2); and
a hydrogen peroxide vaporizer (51) which vaporizes hydrogen peroxide and provides it into the sterilization chamber (2),
wherein the vacuumization accelerator (4) comprises:
an ozone decomposer (7) which decomposes the ozone inside the sterilization chamber (2); and
a hydrogen peroxide decomposer (6) which decomposes the hydrogen peroxide inside the sterilization chamber (2).
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