FABRICATION METHOD OF FLEXIBLE SUBSTRATE HAVING BURIED METAL ELECTRODE USING PLASMA, AND THE FLEXIBLE SUBSTRATE THEREBY

摘要

PURPOSE: A flexible substrate burying a metal wiring of low resistance using plasma and a manufacturing method thereof are provided to remove impurities by performing plasma pretreatment. CONSTITUTION: A substrate is pretreated by emitting plasma. A metal wiring is formed on the pretreated substrate. A polymer layer with the metal wiring is formed by coating and hardening a curable polymer on the upper part of the substrate. The manufactured polymer layer is separated from the pretreated substrate.