| 发明名称 |
CATALYTIC CVD DEVICE, METHOD FOR FORMATION OF FILM, PROCESS FOR PRODUCTION OF SOLAR CELL, AND SUBSTRATE HOLDER |
| 摘要 |
In a catalytic CVD equipment 100, a holder 300 includes an antireflective structure for preventing reflection of a radiant ray that is ejected from the catalytic wire 11 toward the side of the substrate 200. |
| 申请公布号 |
KR20120073318(A) |
申请公布日期 |
2012.07.04 |
| 申请号 |
KR20127011213 |
申请日期 |
2010.10.01 |
| 申请人 |
ULVAC, INC.;SANYO ELECTRIC CO., LTD. |
发明人 |
SHIMA MASAKI;WAKAMIYA YOSHINORI;OSONO SHUJI;OKAYAMA SATOHIRO;OGATA HIDEYUKI |
| 分类号 |
C23C16/44;C23C16/24;H01L21/205 |
主分类号 |
C23C16/44 |
| 代理机构 |
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代理人 |
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