| 摘要 |
<p>A microelectromechanical device (100) having a first structural element (6), a second structural element (10), which is mobile with respect to the first structural element (6), and an elastic supporting structure (12), which extends between the first and second structural elements (6) to enable a relative movement between the first and second structural elements. The microelectromechanical device moreover possesses an anti-stiction structure (1), which includes at least one flexible element (2), which is fixed only with respect to the first structural element (6) and, in a condition of rest, is set at a first distance (l 1 ) from the second structural element (10). The anti-stiction structure (1) is designed to generate a repulsive force (F rep ) between the first and second structural elements in the case of relative movement by an amount greater than the first distance (l 1 ).</p> |
