发明名称 Photoacid generating monomer and precursor thereof
摘要 <p>A monomer compound has the formula (I): where each R 1 , R 2 , and R 3 is independently H, F, C 1-10 alkyl, fluoro-substituted C 1-10 alkyl, C 1-10 cycloalkyl, or fluoro-substituted C 1-10 cycloalkyl, provided that at least one of R 1 , R 2 , or R 3 is F; n is an integer of from 1 to 10, A is a halogenated or non-halogenated C 2-30 olefin-containing polymerizable group, and G + is an organic or inorganic cation. The monomer is the reaction product of a sultone precursor and the oxyanion of a hydroxy-containing halogenated or non-halogenated C 2-30 olefin-containing compound. A polymer includes the monomer of formula (I).</p>
申请公布号 EP2472322(A2) 申请公布日期 2012.07.04
申请号 EP20110195706 申请日期 2011.12.23
申请人 ROHM AND HAAS ELECTRONIC MATERIALS LLC;DOW GLOBAL TECHNOLOGIES LLC 发明人 COLEY, SUZANNE M.;TIMMERS, FRANCIS J.;WILSON, DAVID R.
分类号 G03F7/004;C07C303/06;C07C309/06;C07C309/12;C07C309/17;C07C381/12;C08F220/18;C08F220/24;G03F7/039 主分类号 G03F7/004
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