发明名称 |
SYSTEM FOR FABRICATING A PATTERN ON MAGNETIC RECORDING MEDIA |
摘要 |
<p>An inline processing system for patterning magnetic recording layers on hard discs for use in a hard disc drive. Discs are processed on both sides simultaneously in a vertical orientation, in round plate-like holders called MDCs. A plurality (as many as 10) discs are held in a dial carrier of the MDC, and transferred from one process station to another. The dial carrier of the MDC may be rotated and/or angled at up to 70° from normal in each process station, so that one or a plurality of process sources may treat the discs simultaneously. This configuration provides time savings and a reduction in the number and size of process sources needed. A mask enhancement process for patterning of magnetic media, and a filling and planarizing process used therewith, are also disclosed.</p> |
申请公布号 |
EP2471065(A1) |
申请公布日期 |
2012.07.04 |
申请号 |
EP20100814294 |
申请日期 |
2010.08.26 |
申请人 |
VEECO INSTRUMENTS INC. |
发明人 |
PARANJPE, AJIT;LUSE, TODD, ARTHUR;FREMGEN, ROGER, P.;SRINIVASAN, NARASIMHAN;ROOK, KATRINA;DRUZ, BORIS, L.;CELARU, ADRIAN |
分类号 |
G11B5/65;C23C14/50;H01L21/687 |
主分类号 |
G11B5/65 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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