| 摘要 |
PURPOSE: A patterning device is provided to stably form a groove with a desirable width by changing a posture of a blade end of a patterning tool according to a slope. CONSTITUTION: A holding support unit supports a substrate comprising a solar cell. A patterning tool(60) includes a blade end extended in a longitudinal direction of a blade. A holder(31) fixes the patterning tool. A holder fluctuation unit(34) rotatably holds and supports the holder around a first axis. A driving unit relatively moves the holder fluctuation unit with regard to the holding support unit. |
