摘要 |
Briefly, embodiments of non-volatile memory and embodiments of fabrication thereof are disclosed. For example, a non-volatile memory device having a gate assembly with a floating gate and a control gate assembly is described. The control gate assembly includes a non-metal conductive control gate and a metal control gate in one embodiment. Additional embodiments are described, including use of a sacrificial nitride layer and forming contact recesses to create source or drain contacts, as other examples. |