发明名称 |
Diaphragm flexure with large range and high load capacity |
摘要 |
A stamping structure for imprinting micro-sized features is provided. The stamping structure includes a flexure arrangement having one or more diaphragm flexures arranged in a series or parallel or hybrid configuration so as to manage load-capacity while still achieving adequate vertical and angular range of a sample supported on the one or more diaphragm flexures. |
申请公布号 |
US8210840(B2) |
申请公布日期 |
2012.07.03 |
申请号 |
US20090425647 |
申请日期 |
2009.04.17 |
申请人 |
SHILPICKANDULA VIJAY;YOUCEF-TOUMI KAMAL;MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
SHILPICKANDULA VIJAY;YOUCEF-TOUMI KAMAL |
分类号 |
B29C59/00 |
主分类号 |
B29C59/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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