发明名称 |
Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever |
摘要 |
Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.
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申请公布号 |
US8214915(B2) |
申请公布日期 |
2012.07.03 |
申请号 |
US20090455556 |
申请日期 |
2009.06.03 |
申请人 |
SHIGENO MASATSUGU;WATANABE KAZUTOSHI;IYOKI MASATO;WATANABE NAOYA;SII NANOTECHNOLOGY INC. |
发明人 |
SHIGENO MASATSUGU;WATANABE KAZUTOSHI;IYOKI MASATO;WATANABE NAOYA |
分类号 |
G01Q20/00;G01Q20/04;G01Q60/32;G01Q60/38 |
主分类号 |
G01Q20/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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