SUBSTRATE TRANSFERRING APPARATUS, SUBSTRATE INSPECTING APPARATUS USING THE SAME,申请号KR20090121799-传众专利搜索

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发明名称	SUBSTRATE TRANSFERRING APPARATUS, SUBSTRATE INSPECTING APPARATUS USING THE SAME
摘要
申请公布号	KR101162056(B1)	申请公布日期	2012.07.03
申请号	KR20090121799	申请日期	2009.12.09
申请人		发明人
分类号	H01L21/677;B65G49/06;B65G54/00;G02F1/13	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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