| 摘要 |
PURPOSE: A method for manufacturing a heat radiation plate for a ceramic heater is provided to improve a thermal transfer speed and heating uniformity by integrating the heat radiation plate with the ceramic heater. CONSTITUTION: A ceramic green sheet is manufactured with a tape casting method. A green sheet includes a resistive heating element by printing high melting point paste. A heat radiation plate is sintered under a wet reduction atmosphere by laminating 6 to 8 green sheets. An unevenness is formed on a white surface of the heat radiation plate of sintered Al2O3 96wt% by a sand blast method. The heat radiation plate has various colors by adding inorganic pigments to silica based nano coating solutions. A ceramic heating element is inserted into the hole of the heat radiation plate. |
