LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

摘要

PURPOSE: A lithographic apparatus and a device manufacturing method are provided to reduce power consumption since magnet and coil systems run with either a shuttle driver or a shuttle connector driver or both in parallel. CONSTITUTION: A shuttle(2) is arranged in order to parallelly move in an Y-axis. A shuttle connector(4) connects the shuttle to a carrier and allows the movement of the carrier in a direction which is parallel to an X-axis in relation with the shuttle. The shuttle driver drives the movement of the shuttle which is parallel to the Y-axis. The shuttle is located only on one side of the carrier in the direction which is parallel to the X-axis. The shuttle driver and the shuttle connector provide 10% of Y-components of power added to the carrier by the drive system.