发明名称 APPARATUS OF LIFTING OFF SUBSTRATE
摘要 PURPOSE: An apparatus for stripping a substrate is provided to collect a gold pattern remaining on a substrate by using an adhesive tape to be collected in a roll form. CONSTITUTION: A compressing roller(210) presses an adhesive tape on a substrate while moving in a parallel direction to the substrate. A unwind roller(130) provides the adhesive tape between the compressing roller and the substrate. A stripping unit(300) includes a guide roller and a first stripping roller separated from the guide roller. The guide roller is located on the top of the adhesive tape attached to the substrate. The stripping unit passes through the adhesive tape between the guide roller and the first stripping roller and stripes both particles and the adhesive tape attached to the substrate.
申请公布号 KR20120070387(A) 申请公布日期 2012.06.29
申请号 KR20100131920 申请日期 2010.12.21
申请人 JOIN TECHNOLOGY CO., LTD. 发明人 YOO, JI SANG
分类号 H01L21/302;H01L21/48 主分类号 H01L21/302
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