发明名称 METHOD OF FORMING A NANO-STRUCTURE AND THE NANO-STRUCTURE
摘要 A method of forming a nano-structure can form a fine pattern easily, and the nano-structure obtained by the method is provided. A method of forming a nano-structure comprising forming a thin film by a liquid phase adsorption on surface of a template formed on a substrate, and removing a portion of the thin film, and removing the template is used.
申请公布号 KR101161197(B1) 申请公布日期 2012.06.29
申请号 KR20077000418 申请日期 2005.06.08
申请人 发明人
分类号 B82B3/00;C01B33/12;G03F7/40;H01L21/027 主分类号 B82B3/00
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