| 摘要 |
Disclosed are a liquid processing apparatus and a liquid processing method that can improve substitutability of an atmosphere in a processing chamber to prevent an atmosphere with, for example, a chemical liquid which is scattered during liquid-processing of a substrate from remaining in the processing chamber. In the liquid processing apparatus, an arm standby unit is installed adjacent to a processing chamber and an arm retreating from the processing chamber stands by in the arm standby unit. An elevating/descending cup peripheral case having a cylindrical shape is disposed around a cup in the processing chamber and when the cup peripheral case is disposed at an upper location, a region inside the cup peripheral case is isolated from the outside. An opening through which the arm passes is installed on the cup peripheral case. |
