| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a treatment apparatus which can secure safety with a more simple constitution. <P>SOLUTION: The treatment apparatus includes: treatment chambers each disposed with equipment subjected to prescribed safety measures to ignition and explosion, and in which prescribed treatment is performed using a treatment liquid having inflammability; and shielding chambers each united with the treatment chamber while being isolated therefrom and disposed with electric equipment and the passage of the treatment liquid used in each treatment chamber. The treatment apparatus further includes: a gas leading means for leading gas from the inside of each shielding chamber; and a gas concentration detecting means for detecting the concentration of the gas led by the gas leading means. <P>COPYRIGHT: (C)2012,JPO&INPIT |
