发明名称 Transistor Comprising an Embedded Sigma Shaped Sequentially Formed Semiconductor Alloy
摘要 In sophisticated transistors, a specifically designed semiconductor material, such as a strain-inducing semiconductor material, may be sequentially provided in the drain region and the source region, thereby enabling a significant degree of lateral extension of the grown semiconductor materials without jeopardizing mechanical integrity of the transistor during the processing thereof. For example, semiconductor devices having different drain and source sides may be provided on the basis of sequentially provided embedded semiconductor materials.
申请公布号 US2012161204(A1) 申请公布日期 2012.06.28
申请号 US201113232571 申请日期 2011.09.14
申请人 GLOBALFOUNDRIES INC. 发明人 FLACHOWSKY STEFAN;HOENTSCHEL JAN;KRONHOLZ STEPHAN-DETLEF;SCHEIPER THILO
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
主权项
地址