| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cheap polycrystalline silicon solar cell panel by forming a polycrystalline silicon film on which a pn junction was formed in a small number of steps and in a short time. <P>SOLUTION: A manufacturing method of a polycrystalline silicon solar cell panel includes: a step of forming an amorphous silicon film on a substrate surface in sputtering using a target composed of a silicon doped into an n-type or p-type; a step of plasma-doping a surface layer of the amorphous silicon film in a p-type or n-type dopant; and a step of melting and recrystallizing the plasma-doped amorphous silicon film by scanning the plasma on the amorphous silicon film. <P>COPYRIGHT: (C)2012,JPO&INPIT |
