发明名称 Displacement Sensor with Embedded Coherent Electromagnetic Radiation Interferometer for Micro Scale Proximity Measurements
摘要 The present invention is an interferometer sensor which uses frequency modulated coherent electromagnetic radiation to noncontact measure the displacement of moving targets with high precision. The sensor has an embedded interferometer comprised of an electromagnetic radiation source, a plurality of electromagnetic waveguides, interferometric and extension waveguides, a refractive index gel, or angled end face and an electromagnetic radiation detector.
申请公布号 US2012162661(A1) 申请公布日期 2012.06.28
申请号 US20100958577 申请日期 2010.12.02
申请人 DAGALAKIS NICHOLAS G.;KIM YONG-SIK 发明人 DAGALAKIS NICHOLAS G.;KIM YONG-SIK
分类号 G01B9/02 主分类号 G01B9/02
代理机构 代理人
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