发明名称 CLEANING UNIT AND TREATMENT SOLUTION COATING APPARATUS HAVING THE SAME
摘要 PURPOSE: A cleaning unit and processing liquid coating device with the same are provided to minimize the size of the contact area between processing liquid and a discharging surface, thereby increasing the efficiency of cleaning the nozzle. CONSTITUTION: A first cleaning unit(160) comprises a purge tank(162), an upper frame(163), a blade(164), and a fixing member(168). The purge tank collects ink eliminated by the blade. The blade eliminates processing liquid remaining on a processing liquid discharging surface of a head wherein the head discharges processing liquid. The upper part of the blade is tilted against the discharging surface. The fixing member is coupled with the blade to fix the location of the blade.
申请公布号 KR101160171(B1) 申请公布日期 2012.06.28
申请号 KR20110043114 申请日期 2011.05.06
申请人 发明人
分类号 H01L21/302 主分类号 H01L21/302
代理机构 代理人
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