| 摘要 |
<P>PROBLEM TO BE SOLVED: To change scope and a spot size of light on a sample. <P>SOLUTION: An illumination optical device 1 comprises: luminous flux deflecting means 2 for changing a deflection direction of illumination light emitted from a light source 11; a wave front modulating element 4 which is placed at a position conjugate optically for the luminous flux deflecting means 2 and which can modulate a wave front of the illumination light; a Fourier transform optical system 5 for focusing the illumination light emitted from the wave front modulating element 4 and performing Fourier transformation thereon; an inverse Fourier transform optical system 7 for performing inverse Fourier transform on the illumination light emitted from the Fourier transform optical system 5 to turn the light into an approximately parallel luminous flux; and an objective optical system 8 for focusing the illumination light emitted from the inverse Fourier transform optical system 7 on a subject A. The Fourier transform optical system 5 includes a variable mechanism 5c which can change a focal distance while a focal position of a side of the inverse Fourier transform optical system 7 is maintained in an approximately fixed position. <P>COPYRIGHT: (C)2012,JPO&INPIT |
