| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an application apparatus which is capable of stably applying a liquid to a minute region on a substrate surface. <P>SOLUTION: In the application apparatus, an ink 2 is injected into a nozzle 1, and it is determined on the basis of an output signal of a strain sensor 3 fixed to the nozzle 1 whether or not a tip of the nozzle 1 has come into contact with a surface of a substrate 4. A control unit 5 controls a Z stage 7 to move the nozzle 1 toward the substrate 4 and stops the nozzle 1 in response to contact of the tip of the nozzle 1 with the surface of the substrate 4 to apply the ink 2 at the tip of the nozzle 1 to the surface of the substrate 4. Therefore, an ink layer 2a having substantially the same diameter as a tip diameter of the nozzle 1 can be applied. <P>COPYRIGHT: (C)2012,JPO&INPIT |
