发明名称 |
METHOD FOR PRODUCING COATINGS WITH A SINGLE COMPOSITE TARGET |
摘要 |
The invention pertains to a method for the production of coatings by physical vapor deposition (PVD), wherein a binary target or a target with more than two constituents is evaporated in a curvilinear cathodic arc discharge, causing the ions with different masses (elements) to be splitted and the ion splitting results in variations for the ratio of the different masses (elements) at different positions in the deposition chamber. |
申请公布号 |
US2012160665(A1) |
申请公布日期 |
2012.06.28 |
申请号 |
US201013386093 |
申请日期 |
2010.07.16 |
申请人 |
RAMM JUERGEN;WIDRIG BENO;RUDIGIER HELMUT;OERLIKON TRADING AG, TRUBBACH |
发明人 |
RAMM JUERGEN;WIDRIG BENO;RUDIGIER HELMUT |
分类号 |
C23C14/32 |
主分类号 |
C23C14/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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