SOLID SURFACE FLATTENING METHOD BY GAS CLUSTER ION BEAM AND SOLID SURFACE FLATTENING APPARATUS

摘要

PROBLEM TO BE SOLVED: To reduce scratches present on a solid surface and similar other kinds of surface roughness by applying gas cluster ion beams thereon.

SOLUTION: A solid surface flattening method by gas cluster ion beams includes an irradiation process in which gas cluster ion beams are applied upon a solid surface. This irradiation process is such that at least against an area (or a spot) of the solid surface which has gas cluster ion beams being applied thereon, clusters are bumped from plural directions almost at the same time, thereby flattening the solid surface. Cluster bumping against a spot from plural directions is carried out by applying a plurality of gas cluster ion beams thereon.

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