| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform thermal measurement in a low temperature with a high accuracy. <P>SOLUTION: One embodiment of this invention has a temperature sensor 100 having in its temperature-sensing part 10 an aggregate of single-layer carbon nanotubes (SWCNT), formed in a thin layer shape. The SWCNT aggregate in the temperature-sensing part 10 contains a mixture of semiconductor tubes and metal tubes, and the composition ratio of the semiconductor tubes and the metal tubes in the SWCNT aggregate is adjusted to a predetermined value. The predetermined value is preferably determined in accordance with a range of electric resistance value exhibited by the SWCNT aggregate at the time of thermal measurement. Other embodiments of this invention include a thermal capacity measurement sensor and a thermal conductivity measurement device having the temperature-sensing part, and a heater having the SWCNT aggregate. <P>COPYRIGHT: (C)2012,JPO&INPIT |
