DEVICE FOR PROCESSING MATERIAL OF A WORKPIECE AND METHOD FOR CALIBRATING SUCH A DEVICE

摘要

The invention relates to a device (1) for processing material of a workpiece (2), wherein the device (1) comprises a pulsed processing laser (7), a focussing lens (11) and a beam-deflection unit (10), and also a control unit (22) and a preferably confocal detector unit (18). The intensity of the laser radiation (8) is variable. The invention is characterised in that an imaging unit (14) is provided to detect structures within the workpiece (2) using electromagnetic radiation (15), wherein the electromagnetic radiation (15) of the imaging unit (14) can be radiated via the beam-deflection unit (10) and the focussing lens (10) into the workpiece (2), and in that an evaluating device (24) is provided and is designed to compare the position of the focus (12) of the laser radiation (8) determined by means of the detector unit (18) with the expected position of the focus (12) in the image of the workpiece (2) obtained by the imaging unit (14). The invention also relates to a method for calibrating a device (1) for processing material of a workpiece (2).