发明名称 METHOD OF RECOVERING FILM-FORMING MATERIAL
摘要 <p>Provided is a layer (71) comprising a material that attaches to a magnet in at least the portion of a structure (70) in a chamber that is adjacent to a film-forming material. The method of recovering film-forming material involves a peeling step for peeling an attached object (22) attached to the surface of the structure (70) in the chamber; and a separation step in which fragments of the layer (71) peeled off in the peeling step and comprising the material that attaches to a magnet are attached to a magnet (202a) and separated from the attached object (22), and the attached object (22) is recovered.</p>
申请公布号 WO2012086535(A1) 申请公布日期 2012.06.28
申请号 WO2011JP79151 申请日期 2011.12.16
申请人 SHARP KABUSHIKI KAISHA;SONODA, TOHRU;KAWATO, SHINICHI;INOUE, SATOSHI;HASHIMOTO, SATOSHI 发明人 SONODA, TOHRU;KAWATO, SHINICHI;INOUE, SATOSHI;HASHIMOTO, SATOSHI
分类号 C23C14/00;B03C1/00;B03C1/22;H01L51/50;H05B33/10 主分类号 C23C14/00
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