<p>Provided is a layer (71) comprising a material that attaches to a magnet in at least the portion of a structure (70) in a chamber that is adjacent to a film-forming material. The method of recovering film-forming material involves a peeling step for peeling an attached object (22) attached to the surface of the structure (70) in the chamber; and a separation step in which fragments of the layer (71) peeled off in the peeling step and comprising the material that attaches to a magnet are attached to a magnet (202a) and separated from the attached object (22), and the attached object (22) is recovered.</p>