| 摘要 |
<p>Provided is a sputtering target comprising a metal having the composition of 20 mol% or less of Cr, 5 mol% or more of Pt, and Co as the remainder. This target is a ferromagnetic sputtering target characterized in having a metal base (A) and having, in (A), a Co-Ru alloy phase (B) that includes at least 30 mol% of Ru, and a metal or alloy phase (C) that is different from phase (B) and comprises Co or mainly comprises Co. The obtained ferromagnetic sputtering target lessens magnetic flux leakage and is capable of discharging stably in magnetron sputtering equipment.</p> |
