| 摘要 |
<P>PROBLEM TO BE SOLVED: To minimize as much as possible setting of control procedures for modules provided in a semiconductor testing device. <P>SOLUTION: A semiconductor testing device 1 in the invention that is provided with multiple pin modules 3 and a module of power source module 5 for testing a DUT2 comprises: a sequence information generation part 14 for generating sequence information added as a procedure for controlling, at the last time, a module not set in setting information to the setting information that sets procedures of modules other than the module controlled at the last time among the procedures for controlling each module; and a module control part 15 for controlling the module based on the procedures in the sequence information generated by the sequence information generation part 14. <P>COPYRIGHT: (C)2012,JPO&INPIT |
