CLEAN ROOM DEVICE WITH MOVABLE ELECTROMAGNETIC RADIATION SOURCE
摘要
A clean room device (300) which comprises a movably configured electromagnetic radiation source (302) for irradiating parts of a clean room equipment (304) with electromagnetic radiation for decontaminating a surface to be treated of the clean room equipment (304).
申请公布号
WO2012085250(A1)
申请公布日期
2012.06.28
申请号
WO2011EP73885
申请日期
2011.12.22
申请人
ORTNER CLEANROOM ENGINEERING GMBH;BERG, GABRIELE;LIEBMINGER, STEFAN;OBERAUNER, LISA;KLEIN, THOMAS;STAMPF, ROLAND
发明人
BERG, GABRIELE;LIEBMINGER, STEFAN;OBERAUNER, LISA;KLEIN, THOMAS;STAMPF, ROLAND
