SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing device which suppresses the occurence of defective devices.

SOLUTION: A substrate processing device includes: a first transfer mechanism transferring a belt-like substrate from a first supply part to a first recovery part; a first device attaching a cover member to at least a part of a rear surface of the substrate transferred from the first supply part; a surface treatment device performing treatment on a surface of the substrate transferred from the first device with the cover member attached to the rear surface; and a second device which is disposed between the surface treatment device and the first recovery part and removes the cover member from the substrate transferred from the surface treatment device.

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