| 摘要 |
A manufacturing method of thin film solar cells and thin film solar cells thereof. The thin film solar cells comprise a substrate, an amorphous silicon layer, a first conductive layer, a stacked I-layer, a second conductive layer and a back contact layer. The amorphous silicon layer is on the substrate. The first conductive layer is on the amorphous silicon layer. The stacked I-layer is on the first conductive layer; the stacked I-layer from bottom to top is sequentially stacked by three different deposition rate I-layers: a first I-layer, a second I-layer and a third I-layer. Compared with the first and the third I-layer, the second I-layer has deposition rate higher than those of the other two I-layers. The second conductive layer is on the stacked I-layer. The back contact layer is on the second conductive layer for getting electric energy.
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