VAPOR DEPOSITION DEVICE, VAPOR DEPOSITION METHOD, AND METHOD OF MANUFACTURING ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE

摘要

The disclosed vapor deposition device (50) is provided with: a vapor deposition source (80) having multiple injection ports (81) from which vapor deposition particles are injected onto a substrate (60) on which a film is to be formed; multiple tubes (83a, 83b); a vapor deposition source crucible (82) for supplying vapor deposition particles to a vapor deposition source (80); and a movement means for allowing relative movement of the substrate (60) for film formation relative to the vapor deposition source (80). The tubes (83a, 83b) are connected to both ends of a row of the injection ports (81) on the vapor deposition source (80).