发明名称 Methods Of Forming Semiconductor Devices
摘要 Methods of forming a semiconductor device are provided. The methods may include forming a second insulation pattern on a first insulation pattern. The first insulation pattern may cover a plurality of conductive structures, and may include a hole therein. The second insulation pattern may include a trench therein that is connected with the hole. The methods may also include forming a spacer on sidewalls of the hole and the trench. The methods may further include forming a wiring structure in the hole and the trench.
申请公布号 US2012164831(A1) 申请公布日期 2012.06.28
申请号 US201113313172 申请日期 2011.12.07
申请人 KIM SUN-YOUNG;SONG JUN-EUI;LIM TAE-WAN 发明人 KIM SUN-YOUNG;SONG JUN-EUI;LIM TAE-WAN
分类号 H01L21/768 主分类号 H01L21/768
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