| 发明名称 |
FILM FORMATION METHOD AND STORAGE MEDIUM |
| 摘要 |
A substrate is transferred to a processing container, and a film formation raw material containing cobalt amidinate and a reducing agent containing a carbonic acid in a vapor phase are introduced into the processing container, thereby a Co film is formed on the substrate. |
| 申请公布号 |
US2012164328(A1) |
申请公布日期 |
2012.06.28 |
| 申请号 |
US201013054361 |
申请日期 |
2010.08.26 |
| 申请人 |
KOJIMA YASUHIKO;AZUMO SHUJI;TOKYO ELECTRON LIMITED |
发明人 |
KOJIMA YASUHIKO;AZUMO SHUJI |
| 分类号 |
C23C16/44;B05D1/36;C25D5/00 |
主分类号 |
C23C16/44 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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