INSPECTING APPARATUS

摘要

Inspecting apparatuses may employ a system for performing inspection by illuminating a wafer surface with long and narrow light in order to improve inspection speed, and forming an image of the illuminated region by means of a light detector. The image of the illuminated region, however, is not easily formed correctly by means of the light detector. Such point has not been considered in conventional technologies. The present invention is characterized in having an image-forming optical system that has an optical fiber flux, and furthermore, having a mechanism that rotates the light collecting side of the optical fiber flux. With the present invention, a light detector makes scattered light from an illuminated region correctly form images.